基本信息
This nanoscale high-precision profilometer is designed for the nanoscale measurement needs of top precision manufacturing and research institutes. It adopts active vibration isolation and diamond micro-probe technology to achieve a vertical resolution of 0.001μm, and can accurately measure nanoscale surface roughness and step height parameters. It is suitable for scenarios such as semiconductor lithography masks, nano-coatings and MEMS devices, ensuring quality control accuracy in high-end manufacturing fields.